JPH042435Y2 - - Google Patents
Info
- Publication number
- JPH042435Y2 JPH042435Y2 JP16754084U JP16754084U JPH042435Y2 JP H042435 Y2 JPH042435 Y2 JP H042435Y2 JP 16754084 U JP16754084 U JP 16754084U JP 16754084 U JP16754084 U JP 16754084U JP H042435 Y2 JPH042435 Y2 JP H042435Y2
- Authority
- JP
- Japan
- Prior art keywords
- cam
- arm
- rotary
- pin
- rotary cam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16754084U JPH042435Y2 (en]) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16754084U JPH042435Y2 (en]) | 1984-11-05 | 1984-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183145U JPS6183145U (en]) | 1986-06-02 |
| JPH042435Y2 true JPH042435Y2 (en]) | 1992-01-28 |
Family
ID=30725333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16754084U Expired JPH042435Y2 (en]) | 1984-11-05 | 1984-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042435Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6955382B2 (en) * | 2002-01-15 | 2005-10-18 | Entegris, Inc. | Wafer carrier door and latching mechanism with c-shaped cam follower |
-
1984
- 1984-11-05 JP JP16754084U patent/JPH042435Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6183145U (en]) | 1986-06-02 |
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